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Fully Automatic Organic Photoresist Stripper

Fully Automatic Organic Photoresist Stripper

ItemSpecification
Applicable Workpiece8-12 inch wafer strip cleaning
Batch Capacity8~12 inch 13/25 pcs/batch
Process FlowFOUP → EFM → Stripping → IPA → QDR → QDR → DRYING → EFM → FOUP
Main MaterialsSUS frame + SUS shell plate, tank made of SUS316L Quartz/PVDF/PTFE material
Transfer MethodRobot arm transfer
Cycle TimeAdjustable from 5~10 minutes according to process requirements
Process PerformanceStripping efficiency ≥99%
Other DescriptionThis equipment can be customized to manual/semi-automatic operation according to customer requirements

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